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LX-754R
XBC Laser Grooving Machine
Application Field:
The laser ablation process technology applied to backcontact (BC) solar cells utilizes an ultrafast laser with a flat-top beam profile to pattern the mask for creating interdigitated P-type and N-type regions, thereby achieving localized doping functionality
Product Features
- Innovative optical transmission system design, with high reliability and stability.
- High-efficiency, flat-top, and uniform large spot, high processing efficiency.
Basic Parameters
| Item | Technical Indicator |
|---|---|
| Basic Functions | Fully automatic BC laser film-opening equipment, dual-track with 4 heads, capable of offline integration with AGV. |
| Laser | Self-developed thin-disk ultrafast laser, 1-year warranty |
| Spot size | 100~300μm (optional), square flat-top homogenized spot |
| Processing cell size | 18X mm x 18X mm to 210 mm x 210 mm (compatible with rectangular wafers and half wafers) |
| Equipment Capacity | TBC-BSG Laser Film Opening: 6,000 uph @ 210R half-cell TBC-PSG Laser Film Opening: 7,500 uph @ 210R half-cel |
| Processing Mode | High-precision high-speed galvanometer scanning |
| Chipping rate | ≤ 0.02% |
| Geometric Accuracy | PT accuracy ≤ ±15 μm ;Line spacing accuracy ≤ ±10μm |
| Wafer Inspection | Front inspection industrial camera, ≥ 10 million pixels; rear inspection optional |
| Dust Removal and Filtration Efficiency | Dust removal efficiency > 95%, dust filtration efficiency > 99% |
| Loading mode | Dual-side or one-side loading/unloading |
| Control system | Programmable Logic Controller (PLC) + Industrial Personal Computer (IPC) |
| User Interface | LCD display, touch operation, online monitoring, permission management, etc. |
| Manufacturing Execution System (MES) | Equipped with the MES information interface |
Sample Effect
Spot shaping and grooving effect 1
Spot shaping and grooving effect 2
