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PE-8700-A-001
Wafer Handling System for Graphite Boat
Application Field:
It is used for automatic loading and unloading of the solar cell silicon wafer tubular PECVD&PE POLY equipment. It can automatically load incoming silicon wafers into the graphite boat, deliver the graphite boat into the tubular PECVD&PE POLY equipment for process treatment, and automatically unload the processed silicon wafers from the graphite boat into the cassette. It can also automatically detect and sort NG (non-good) wafers and OK (good) wafers, and can be docked with an AGV and transferred to the next process.
Product Features
- Modular design for easy maintenance and simplicity;
- Utilization of PLC-controlled user-friendly interfaces for easy operation and understanding and real-time temperature monitoring;
- Optional functions, including online micro-crack detection, online film thickness detection, online color difference detection, online CCD-based warped wafer detection, and automatic handling of NG wafers;
- Online/Offline configuration;
- Support for AGV, RFID, and MES function expansion;
- Square tube sheet metal structure with a large transparent window, providing stable and reliable construction;
- Multiple fool-proof measures and multiple sensing alarms for important workstations.
Basic Parameters
Mechanical System Specification Table | ||
|---|---|---|
Silicon Wafer | Monocrystalline/Polycrystalline | Compatibility |
| Size of Silicon Wafer Used for Production and Design (mm) | 182 x 182 to 230 x 230 (typically only compatible with adjacent sizes on the same equipment) Note: Mechanical adjustments and modifications are required when the wafer size is switched. | |
Thickness (mm) | 0.10-0.2 | |
Device Operation Capacity | Actual Operating Capacity (Net Capacity) | 182: ≥ 8000 pcs/h @ 32 pcs/slot |
Actual Operating Capacity (Net Capacity) | Thickness > 130 μm: 182 ≤ 0.02%, 210 ≤ 0.03%;Thickness < 130 μm: 182 ≤ 0.05%, 210 ≤ 0.08%;A-grade wafers, without detects such as micro-cracks | |
| Uptime | 98% | |
Inspection Function | Cassette RFID Reading Head | Reserved installation position for the cassette RFID reading head |
Unloading Detection | Reserved space for online AOI installation on the process surface;Reserved space for integrated PL-AOI and large wafer inspection | |
| Warped Wafer Detection | Reserved space for CCD-based warped wafer detection (automation and main machine interface) | |
Functional Structure | Loading and Unloading Channels | Cassette loading and unloading with two channels for loading, two channels for unloading, and one channel for rework |
Cassette Track | Matched with AGV, cassette conveyor track configured as 5+1+1 | |
Cassette Circulation | Automatic circulation of the empty cassette from the loading end to the unloading end | |
Graphite Boat Workstation | Dual workstations | |
Boat Tapping Device | Equipped with one boat tapping device, which has adjustable force and can be individually shielded | |
Wafer Alignment | Providing an encoder servo motor for wafer alignment, with adjustable parameters | |
| Fool-proof Mechanism | Fool-proof mechanism required for cassette and graphite boat workstations to prevent misplacement by personnel, alarm reminder required, and no loading/unloading action allowed after misplacement | |
| Vacuum Generator | One vacuum generator required to control suction cups | |
| Graphite Boat Temperature Detection | Wafer insertion and removal is allowed when the graphite boat temperature detected from the main machine is ≤ 45°C | |
