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PK-12000-A-001
Wafer Handling System for Quartz Boat
Application Field:
It is used for automatic loading and unloading of solar cell silicon wafer tubular diffusion/annealing equipment. The incoming silicon wafers can be automatically loaded into the quartz boat, sent to the tubular diffusion/annealing equipment for process treatment, and automatically unloaded from the quartz boat into cassette after process treatment. It supports docking with the AGV to transfer to the next process.
Product Features
- Equipment modular design, simple and easy to maintain;
- Online and offline configuration;
- Support the connection of two tubular diffusion equipment;
- Support AGV, RFID, MES function expansion;
- HMI controlled by PLC, easy to use and understand, real-time temperature monitoring;
- Square tube + sheet metal welding, equipped with large transparent windows, with stable and reliable structure;
- Optional functions of online square resistance detection and online boat working position detection;
- Multiple fool-proof, multiple sensor warning for important stations.
Basic Parameters
| Item | Technical Indicator | |
|---|---|---|
| Silicon wafer | Compatible wafer size | 182x182~210x210 (the same equipment is generally only compatible with two adjacent sizes) Note: When switching silicon wafers of different sizes, it is necessary to adjust the mechanical structure |
| Thickness (mm) | 0.11~0.20 | |
| Equipment Operating Capability | Actual operating capacity (net capacity) | 182: ≥ 12500 pcs/h @ 120 cassettes;210: ≥ 10500 pcs/h @ 100 cassettes |
| Chipping rate | T182:≤0.02%,210:≤0.03% | |
| EL defects such as scratches on suction cups | ≤0.03% or not lower than the same industry level | |
| Up time | ≥98% | |
| Mean time between failures (MTBF) | MTBF≥300h | |
| Mean time to repair (MTTR) | MTTR≤2h | |
| Detection | Online Sheet Resistance Detection | Reserved installation position for sheet resistance detection |
| CCD camera | AOI test of chipping at the boat working station is configured, giving alarm when abnormity occurs. | |
| Insertion method | Gantry insert | |
| Functional Structure | Number of cassette station | Double stations, each has two cassettes. When A station is working, B station is getting ready |
| Number of quartz boat station | Double stations | |
| Cassette loading/unloading mode | Six-axis robot handling | |
| Quartz boat loading/unloading mode | Gantry truss three-axis robot handling | |
| Quartz boat wafer separating assist | Wafer separating by air knife | |
| Missing piece detection | Dropping or missing piece detection | |
| Card detection | The cassette position and the boat position have card and dropping piece detection functions | |
